JPH0239165U - - Google Patents
Info
- Publication number
- JPH0239165U JPH0239165U JP11866288U JP11866288U JPH0239165U JP H0239165 U JPH0239165 U JP H0239165U JP 11866288 U JP11866288 U JP 11866288U JP 11866288 U JP11866288 U JP 11866288U JP H0239165 U JPH0239165 U JP H0239165U
- Authority
- JP
- Japan
- Prior art keywords
- weight
- curved surface
- flexible member
- acceleration sensor
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11866288U JPH0632625Y2 (ja) | 1988-09-09 | 1988-09-09 | 加速度センサー |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11866288U JPH0632625Y2 (ja) | 1988-09-09 | 1988-09-09 | 加速度センサー |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0239165U true JPH0239165U (en]) | 1990-03-15 |
JPH0632625Y2 JPH0632625Y2 (ja) | 1994-08-24 |
Family
ID=31363203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11866288U Expired - Lifetime JPH0632625Y2 (ja) | 1988-09-09 | 1988-09-09 | 加速度センサー |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0632625Y2 (en]) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111863681A (zh) * | 2019-04-26 | 2020-10-30 | 台湾积体电路制造股份有限公司 | 搬运装置及其应用的搬运系统及搬运系统的预测保养方法 |
-
1988
- 1988-09-09 JP JP11866288U patent/JPH0632625Y2/ja not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111863681A (zh) * | 2019-04-26 | 2020-10-30 | 台湾积体电路制造股份有限公司 | 搬运装置及其应用的搬运系统及搬运系统的预测保养方法 |
CN111863681B (zh) * | 2019-04-26 | 2024-05-24 | 台湾积体电路制造股份有限公司 | 搬运装置及其应用的搬运系统及搬运系统的预测保养方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0632625Y2 (ja) | 1994-08-24 |